Phase-shifting interferometer for monitoring flat and spherical optical components

被引：2
|
作者：
Vishnyakov, G. N. [1 ]
Levin, G. G. [1 ]
Minaev, V. L. [1 ]
Tselmina, I. Y. [2 ]
机构：
[1] FGUP All Russia Sci Res Inst Optophys Measurement, Moscow, Russia
[2] OAO Ramenskoe Instrumentat Factory, Ramenskoye, Russia
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2013年 / 80卷 / 05期
关键词：
Compendex;
D O I：
10.1364/JOT.80.000316
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper discusses an automatic interferometer that makes it possible to measure the surface profile of flat and spherical (with a large radius of curvature) optical items. The interferometer's field of view is as much as 30 mm in diameter. The vertical configuration of the main optical elements of the interferometer allowed it to be made compact and insensitive to vibrations. The surface profile is automatically measured by means of a nine-step phase-shift method. The results of experimental testing of the interferometer and its technical characteristics are presented. (C) 2013 Optical Society of America.
引用
收藏
页码：316 / 320
页数：5
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