Nanolithography Toolbox: Device design at the nanoscale

被引：0

作者：

Balram, K. C. ^{[1
,2
]}

Westly, D. A. ^{[1
]}

Davanco, M. ^{[1
]}

Grutter, K. E. ^{[1
]}

Li, Q. ^{[1
,2
]}

Michels, T. ^{[1
]}

Ray, C. H. ^{[1
]}

Yu, L. ^{[1
]}

Kasica, R. J. ^{[1
]}

Wallin, C. B. ^{[1
,2
]}

Gilbert, I. J. ^{[1
,2
]}

Bryce, Brian A. ^{[3
]}

Simelgor, G. ^{[4
]}

Topolancik, J. ^{[5
]}

Lobontiu, N. ^{[6
]}

Liu, Y. ^{[7
]}

Neuzil, P. ^{[8
,9
]}

Svatos, V. ^{[8
]}

Dill, K. A. ^{[1
]}

Bertrand, N. A. ^{[1
]}

Metzler, M. ^{[10
]}

Lopez, G. ^{[10
]}

Czaplewski, D. A. ^{[11
]}

Ocola, L. ^{[11
]}

Srinivasan, K. A. ^{[1
]}

Stavis, S. M. ^{[1
]}

Aksyuk, V. A. ^{[1
]}

Liddle, J. A. ^{[1
]}

Krylov, S. ^{[12
]}

Ilic, B. R. ^{[1
]}

机构：

[1] NIST, Ctr Nanoscale Sci & Technol, Gaithersburg, MD 20899 USA

[2] Univ Maryland, Maryland NanoCtr, College Pk, MD 20742 USA

[3] Harvey Mudd Coll, Claremont, CA 91711 USA

[4] Edico Genome, La Jolla, CA 92037 USA

[5] Roche Sequencing Solut, Pleasanton, CA 94588 USA

[6] Univ Alaska Anchorage, Mech Engn, Anchorage, AK 99508 USA

[7] Worcester Polytech Inst, Mech Engn, Worcester, MA 01609 USA

[8] Brno Univ Technol, Cent European Inst Technol, Tech 3058 10, CZ-61600 Brno, Czech Republic

[9] Northwestern Polytech Univ, Dept Microsyst, Xian, Shaanxi, Peoples R China

[10] Univ Penn, Quattrone Nanofabricat Facil, Philadelphia, PA 19104 USA

[11] Argonne Natl Lab, Ctr Nanoscale Mat, Lemont, IL 60439 USA

[12] Tel Aviv Univ, Sch Mech Engn, IL-69978 Tel Aviv, Israel

来源：

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2017年

关键词：

LITHOGRAPHY; RESOLUTION; PLATFORM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

引用

页数：2

共 50 条

[41] A Thermal-Aware Device Design Considerations for Nanoscale SOI and Bulk FinFETs
Kumar, Ulayil Sajesh
Rao, Valipe Ramgopal
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2016, 63 (01) : 280 - 287
[42] Device Design Engineering for Optimum Analog/RF Performance of Nanoscale DG MOSFETs
Sharma, Rupendra Kumar
Bucher, Matthias
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2012, 11 (05) : 992 - 998
[43] Simplifying the design, analysis, and layout of a N/MEMS nanoscale material testing device
Bansal, Richa
Clark, Jason V.
Sensors and Transducers, 2011, 13 (SPEC.ISSUE): : 87 - 97
[44] Optimization of the device design technologies for analog/RF performance of nanoscale DG MOSFETs
Sharma, Rupendra Kumar
Bucher, Matthias
NANOTECHNOLOGY 2012, VOL 2: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, 2012, : 27 - 30
[45] All-Optical Nanoscale Microring Device and System Design for Nano Communication
Sangwaranatee, N.
Sangwaranatee, N. W.
Teeka, C.
Yupapin, P. P.
ISEEC, 2012, 32 : 509 - 515
[46] TCAD Assessment of Device Design Technologies for Enhanced Performance of Nanoscale DG MOSFET
Sharma, Rupendra Kumar
Gupta, Mridula
Gupta, R. S.
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (09) : 2936 - 2943
[47] SIMPLIFYING THE DESIGN PROCESS OF A MEMS-BASED NANOSCALE MATERIAL TESTING DEVICE
Bansal, Richa
Clark, Jason V.
NANOTECHNOLOGY 2011: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, NSTI-NANOTECH 2011, VOL 2, 2011, : 663 - 666
[48] Multiscale modeling motivation, strategy, and approaches for nanoscale material and device design and development
Barto, Richard R.
Borders, Tammie L.
Breneman, Curt M.
Schadler, Linda S.
Cho, K. J.
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2009, 237
[49] Design and Verification of a PECVD fabricated Multi-Layer NanoScale Photovoltaic Device
Hajimir, Shima
Howell, John R.
Holt, Milo
Saha, Sayan
Akinwande, Deji
Banerjee, Sanjay
PROCEEDINGS OF THE ASME SUMMER HEAT TRANSFER CONFERENCE - 2013, VOL 1, 2014,
[50] POLY 308-Building nanoscale systems with DNA toolbox
Gang, Oleg
Nykypanchuk, Dmytro
Xiong, Huiming
van der Lelie, Daniel
Maye, Mathew M.
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2009, 238

← 1 2 3 4 5 →