Nanolithography Toolbox: Device design at the nanoscale

被引：0

作者：

Balram, K. C. ^{[1
,2
]}

Westly, D. A. ^{[1
]}

Davanco, M. ^{[1
]}

Grutter, K. E. ^{[1
]}

Li, Q. ^{[1
,2
]}

Michels, T. ^{[1
]}

Ray, C. H. ^{[1
]}

Yu, L. ^{[1
]}

Kasica, R. J. ^{[1
]}

Wallin, C. B. ^{[1
,2
]}

Gilbert, I. J. ^{[1
,2
]}

Bryce, Brian A. ^{[3
]}

Simelgor, G. ^{[4
]}

Topolancik, J. ^{[5
]}

Lobontiu, N. ^{[6
]}

Liu, Y. ^{[7
]}

Neuzil, P. ^{[8
,9
]}

Svatos, V. ^{[8
]}

Dill, K. A. ^{[1
]}

Bertrand, N. A. ^{[1
]}

Metzler, M. ^{[10
]}

Lopez, G. ^{[10
]}

Czaplewski, D. A. ^{[11
]}

Ocola, L. ^{[11
]}

Srinivasan, K. A. ^{[1
]}

Stavis, S. M. ^{[1
]}

Aksyuk, V. A. ^{[1
]}

Liddle, J. A. ^{[1
]}

Krylov, S. ^{[12
]}

Ilic, B. R. ^{[1
]}

机构：

[1] NIST, Ctr Nanoscale Sci & Technol, Gaithersburg, MD 20899 USA

[2] Univ Maryland, Maryland NanoCtr, College Pk, MD 20742 USA

[3] Harvey Mudd Coll, Claremont, CA 91711 USA

[4] Edico Genome, La Jolla, CA 92037 USA

[5] Roche Sequencing Solut, Pleasanton, CA 94588 USA

[6] Univ Alaska Anchorage, Mech Engn, Anchorage, AK 99508 USA

[7] Worcester Polytech Inst, Mech Engn, Worcester, MA 01609 USA

[8] Brno Univ Technol, Cent European Inst Technol, Tech 3058 10, CZ-61600 Brno, Czech Republic

[9] Northwestern Polytech Univ, Dept Microsyst, Xian, Shaanxi, Peoples R China

[10] Univ Penn, Quattrone Nanofabricat Facil, Philadelphia, PA 19104 USA

[11] Argonne Natl Lab, Ctr Nanoscale Mat, Lemont, IL 60439 USA

[12] Tel Aviv Univ, Sch Mech Engn, IL-69978 Tel Aviv, Israel

来源：

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2017年

关键词：

LITHOGRAPHY; RESOLUTION; PLATFORM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

引用

页数：2

共 50 条

[31] Optimization for an active fountain pen nanolithography device fabrication
Wu, Rui Ming
Han, Lee Suk
Mo, Kim Hun
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2011, 25 (04) : 987 - 993
[32] Nanoscale fabrication in aqueous KOH solution using tribo-nanolithography
Kawasegi, N
Park, JW
Morita, N
Yamada, S
Takano, N
Oyama, T
Ashida, K
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (06): : 2471 - 2475
[33] Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns
Bang, Joona
Jeong, Unyong
Ryu, Du Yeol
Russell, Thomas P.
Hawker, Craig J.
ADVANCED MATERIALS, 2009, 21 (47) : 4769 - 4792
[34] Nanoscale viscoplastic behavior of smectic liquid crystals and its application in nanolithography
Schulz, Benjamin
Steffen, Paul
Bahr, Christian
JOURNAL OF APPLIED PHYSICS, 2014, 115 (07)
[35] Nanoscale patterning of NiFe surface by scanning probe microscopy scratch nanolithography
Miyashita, Kazuya
Nishimura, Shinya
Toyofuku, Takashi
Shirakashi, Jun-ichi
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (02): : 953 - 957
[36] Organic Mono layers, Networks, Electrochemistry: A Toolbox for the Nanoscale
Buck, Manfred
INTERNATIONAL CONFERENCE ON PHYSICS OF EMERGING FUNCTIONAL MATERIALS (PEFM-2010), 2010, 1313 : 13 - 19
[37] Nanoscale deposition of solid inks via thermal dip pen nanolithography
Sheehan, PE
Whitman, LJ
King, WP
Nelson, BA
APPLIED PHYSICS LETTERS, 2004, 85 (09) : 1589 - 1591
[38] Contact optical nanolithography using nanoscale C-shaped apertures
Wang, Liang
Jin, Eric X.
Uppuluri, Sreemanth M.
Xu, Xianfan
OPTICS EXPRESS, 2006, 14 (21): : 9902 - 9908
[39] Advanced Design of Block Copolymers for Nanolithography
Chen, Leilei
Tao, Yongxin
Hu, Xin
Feng, Hongbo
Zhu, Ning
Guo, Kai
PROGRESS IN CHEMISTRY, 2023, 35 (11) : 1613 - 1624
[40] Design Ideator: A Conceptual Design Toolbox
Narsale, S.
Chen, Y.
Mohan, M.
Shah, Jami J.
JOURNAL OF COMPUTING AND INFORMATION SCIENCE IN ENGINEERING, 2019, 19 (04)

← 1 2 3 4 5 →