Nanolithography Toolbox: Device design at the nanoscale

被引：0

作者：

Balram, K. C. ^{[1
,2
]}

Westly, D. A. ^{[1
]}

Davanco, M. ^{[1
]}

Grutter, K. E. ^{[1
]}

Li, Q. ^{[1
,2
]}

Michels, T. ^{[1
]}

Ray, C. H. ^{[1
]}

Yu, L. ^{[1
]}

Kasica, R. J. ^{[1
]}

Wallin, C. B. ^{[1
,2
]}

Gilbert, I. J. ^{[1
,2
]}

Bryce, Brian A. ^{[3
]}

Simelgor, G. ^{[4
]}

Topolancik, J. ^{[5
]}

Lobontiu, N. ^{[6
]}

Liu, Y. ^{[7
]}

Neuzil, P. ^{[8
,9
]}

Svatos, V. ^{[8
]}

Dill, K. A. ^{[1
]}

Bertrand, N. A. ^{[1
]}

Metzler, M. ^{[10
]}

Lopez, G. ^{[10
]}

Czaplewski, D. A. ^{[11
]}

Ocola, L. ^{[11
]}

Srinivasan, K. A. ^{[1
]}

Stavis, S. M. ^{[1
]}

Aksyuk, V. A. ^{[1
]}

Liddle, J. A. ^{[1
]}

Krylov, S. ^{[12
]}

Ilic, B. R. ^{[1
]}

机构：

[1] NIST, Ctr Nanoscale Sci & Technol, Gaithersburg, MD 20899 USA

[2] Univ Maryland, Maryland NanoCtr, College Pk, MD 20742 USA

[3] Harvey Mudd Coll, Claremont, CA 91711 USA

[4] Edico Genome, La Jolla, CA 92037 USA

[5] Roche Sequencing Solut, Pleasanton, CA 94588 USA

[6] Univ Alaska Anchorage, Mech Engn, Anchorage, AK 99508 USA

[7] Worcester Polytech Inst, Mech Engn, Worcester, MA 01609 USA

[8] Brno Univ Technol, Cent European Inst Technol, Tech 3058 10, CZ-61600 Brno, Czech Republic

[9] Northwestern Polytech Univ, Dept Microsyst, Xian, Shaanxi, Peoples R China

[10] Univ Penn, Quattrone Nanofabricat Facil, Philadelphia, PA 19104 USA

[11] Argonne Natl Lab, Ctr Nanoscale Mat, Lemont, IL 60439 USA

[12] Tel Aviv Univ, Sch Mech Engn, IL-69978 Tel Aviv, Israel

来源：

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2017年

关键词：

LITHOGRAPHY; RESOLUTION; PLATFORM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

引用

页数：2

共 50 条

[21] Parallel optical nanolithography using nanoscale bowtie aperture array
Uppuluri, Sreemanth M. V.
Kinzel, Edward C.
Li, Yan
Xu, Xianfan
OPTICS EXPRESS, 2010, 18 (07): : 7369 - 7375
[22] Nanolithography in thermally sacrificial polymers using nanoscale thermal probes
Hua, Yueming
Saxena, Shubham
King, William P.
Henderson, Clifford L.
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XXIII, PTS 1 AND 2, 2006, 6153 : U585 - U591
[23] Capillary force on a nanoscale tip in dip-pen nanolithography
Jang, J
Schatz, GC
Ratner, MA
PHYSICAL REVIEW LETTERS, 2003, 90 (15)
[24] TyBox: An Automatic Design and Code Generation Toolbox for TinyML Incremental On-Device Learning
Pavan, Massimo
Ostrovan, Eugeniu
Caltabiano, Armando
Roveri, Manuel
ACM TRANSACTIONS ON EMBEDDED COMPUTING SYSTEMS, 2024, 23 (03)
[25] Device design consideration for nanoscale MOSFET using semiconductor TCAD tools
Hong, Teoh Chin
Ismail, Razali
2006 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2006, : 906 - +
[26] Optimization for an active fountain pen nanolithography device fabrication
Rui Ming Wu
Lee Suk Han
Kim Hun Mo
Journal of Mechanical Science and Technology, 2011, 25 : 987 - 993
[27] A toolbox for protein design
Birte Höcker
Nature, 2012, 491 : 204 - 205
[28] Mechanical Behavior at the Nanoscale: What's in your Toolbox?
Cordill, Megan J.
Weinberger, Christopher R.
JOM, 2018, 70 (07) : 1065 - 1067
[29] Directly writing with nanoparticles at the nanoscale using dip-pen nanolithography
Roy, Debdulal
Munz, Martin
Colombi, Paolo
Bhattacharyya, Sanjib
Salvetat, Jean-Paul
Cumpson, P. J.
Saboungi, Marie-Louise
APPLIED SURFACE SCIENCE, 2007, 254 (05) : 1394 - 1398
[30] Mechanical Behavior at the Nanoscale: What’s in your Toolbox?
Megan J. Cordill
Christopher R. Weinberger
JOM, 2018, 70 : 1065 - 1067

← 1 2 3 4 5 →