Properties of Bi-Sr-Ca-Cu-O(2212) films deposited by sputtering on tilted substrates

被引:3
|
作者
Moriya, M [1 ]
Okamoto, T [1 ]
Usami, K [1 ]
Kobayashi, T [1 ]
Goto, T [1 ]
机构
[1] Univ Electrocommun, Chofu, Tokyo 1828585, Japan
关键词
D O I
10.1109/77.784950
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Bi-Sr-Ca-Cu-O(2212) thin films have been deposited on tilted SrTiO3 substrates using a de sputtering system. Those films have been deposited at 710-790 degrees C. Thickness of these films is about 170nm, The films deposited at 730, 750 and 770 degrees C have exhibited superconductivity, and the highest value of critical temperature is about 70K for the film deposited at 750 degrees C. The crystal structure of this film has also been investigated by a X-ray diffraction with c-axis oriented 2212 phase.
引用
收藏
页码:2380 / 2382
页数:3
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