Optimized wet processes and PECVD for high-efficiency solar cells

被引：2
|
作者：
Kashkoush, I. [1 ]
Chen, G. [1 ]
Nemeth, D. [1 ]
Rieker, J. [1 ]
机构：
[1] Akrion Syst LLC, Allentown, PA 18106 USA
来源：
ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES XI | 2013年 / 195卷
关键词：
heterojunction; texturization; PECVD;
D O I：
10.4028/www.scientific.net/SSP.195.297
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：297 / 300
页数：4
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