Research on Compensation Testing Method for Large-Aperture and High-Order Aspheric Surface

被引：6
|
作者：
Zhao Chuchu [1 ]
Hu Mingyong [1 ]
Zhang Shaowei [2 ]
Li Xinglong [2 ]
Li Zhaoyang [1 ]
机构：
[1] Hefei Univ Technol, Acad Photoelect Technol, Hefei 230009, Anhui, Peoples R China
[2] Shanghai Aerosp Control Technol Inst, Shanghai 201109, Peoples R China
来源：
LASER & OPTOELECTRONICS PROGRESS | 2020年 / 57卷 / 07期
关键词：
high-order aspheric surface; third-order aberration; compensation detection; normal aberration;
D O I：
10.3788/LOP57.072203
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
One of the difficult problems in optical manufacturing is to process and test large aperture and high-order aspheric surface. The spherical aberration coefficient of a high-order aspheric concave mirror with an effective aperture of 900 mm and a radius of curvature of 2580 mm was derived. Based on third-order aberration theory, the normal aberration of the high-order aspheric surface was compensated, and the initial structure of the compensation system was solved. Compensation systems based on spherical wave and plane wave were designed respectively, and the high-order aspheric concave mirrors were polished. The accuracy of the surface shape measured by fourdimensional interferometer is 0.022A which meets the actual measurement requirements.
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页数：7
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