A small-scale beam-plasma generator

被引:0
|
作者
Vaitonis, VV [1 ]
Vizgalov, IV [1 ]
Kurnaev, VA [1 ]
机构
[1] Tech Univ, Moscow State Engn Phys Inst, Moscow 115409, Russia
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D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A small-scale beam-plasma generator, which can be installed in an arbitrary vacuum chamber with a Dy100 joint flange, is described. A current of Ar ions of 40 mA is obtained in the Penning discharge mode at a cathode potential of 360 V and a discharge current of 1 A.
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收藏
页码:714 / 715
页数:2
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