Applications of CVLs in the electronics industry

被引：0
|
作者：
Lesnoi, MA
Zubov, VV
Chursin, AD
Gaponov, SS
Glikin, LS
机构：
来源：
PULSED METAL VAPOUR LASERS | 1996年 / 5卷
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D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The requirements for copper vapour laser (CVL) used in electronic industry are determined. Main characteristics of the lasers and laser discharge tubes used in electronic industry in Russia are described. High efficiency of CVL application for processing of different materials and structures was demonstrated. Several original methods of laser processing and control of electronic industry elements and products have been suggested and realised in industrial equipment.
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页码：377 / 382
页数：6
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