Dielectrophoretic nanoassembly of individual carbon nanotubes onto nanoelectrodes

被引：0
|
作者：
Subramanian, A [1 ]
Nelson, BJ [1 ]
Dong, LX [1 ]
Bell, D [1 ]
机构：
[1] ETH, IRIS, CH-8092 Zurich, Switzerland
来源：
ISATP 2005: IEEE INTERNATIONAL SYMPOSIUM ON ASSEMBLY AND TASK PLANNING (ISATP) | 2005年
关键词：
D O I：
10.1109/ISATP.2005.1511473
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Dielectrophoretic assembly of individual carbon nanotube (CNT) based NEMS is experimentally; realized with nanoelectrodes fabricated using electron-beam lithography. The successful manipulation and assembly of single carbon nanotubes using dielectrophoretic forces produced by nanoelectrodes will lead to a higher integration of CNTs into both nanoelectronics and NEMS.
引用
收藏
页码：200 / 205
页数：6
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