Pattern Transfer of Directed Self-Assembly (DSA) Patterns for CMOS Device Applications

We present a study on the optimization of etch transfer processes for circuit relevant patterning in the sub 30 nm pitch regime using directed self assembly (DSA) line-space patterning. This work is focused on issues that impact the patterning of thin silicon fins and gate stack materials. Plasma power, chuck temperature and end point strategy is discussed in terms of their effect on critical dimension (CD) control and pattern fidelity. A systematic study of post-plasma etch annealing processes shows that both CD and line edge roughness (LER) in crystalline Si features can be further reduced while maintaining a suitable geometry for scaled FinFET devices. Results from DSA patterning of gate structures featuring a high-k dielectric, a metal nitride and poly Si gate electrode and a SiN capping layer are also presented. We conclude with the presentation of a strategy for realizing circuit patterns from groups of DSA patterned fins. These combined results further establish the viability of DSA pattern generation as a potential method for CMOS integrated circuit patterning beyond the 10 nm node.