Self-positioning of polymer membranes driven by thermomechanically induced plastic deformation

被引：5
|
作者：
Haefliger, D [1 ]
Hansen, O [1 ]
Boisen, A [1 ]
机构：
[1] Tech Univ Denmark, Dept Micro & Nanotechnol, MIC, DK-2800 Kongens Lyngby, Denmark
来源：
ADVANCED MATERIALS | 2006年 / 18卷 / 02期
关键词：
D O I：
10.1002/adma.200501687
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Stress in polymeric resins is tailored by a thermomechanical process. It allows for controlled self-positioning of membranes in microdevices (see Figure). The process makes specific use of plastic deformation that results from the low viscosity of the polymer. This demonstrates that polymers offer new approaches to microfabrication that cannot be realized for common semiconductor materials without severe difficulties.
引用
收藏
页码：238 / +
页数：5
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