The high-temperature tribological properties of Si-DLC films

被引：39
|
作者：
Yang, Baoping [2 ]
Zheng, Yu [1 ,2 ]
Zhang, Bin [1 ]
Wei, Li [1 ]
Zhang, Junyan [1 ]
机构：
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Lanzhou Univ Technol, Dept Petrochem Technol, Lanzhou 730050, Peoples R China
来源：
SURFACE AND INTERFACE ANALYSIS | 2012年 / 44卷 / 13期
关键词：
silicon-containing diamond-like-carbon films; high-temperature tribology; thermal stability; AMORPHOUS-CARBON; THERMAL-STABILITY; BEHAVIOR; COATINGS;
D O I：
10.1002/sia.5094
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The tribological properties of Silicon-containing diamond-like-carbon (Si-DLC) films, deposited by magnetron sputtering Si target in methane/argon atmosphere, were studied in comparison with diamond-like-carbon (DLC) films. The DLC films disappeared because of the oxidation in the air at 500 degrees C, whereas the Si-DLC films still remained, implying that the addition of Si improved significantly the thermal stability of DLC films. Retarded hydrogen release from DLC film at high temperature and silicon oxide on the surface might have contributed to lower friction coefficient of the Si-DLC films both after annealing treatment and in situ high-temperature environment. Copyright (C) 2012 John Wiley & Sons, Ltd.
引用
收藏
页码：1601 / 1605
页数：5
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