Parameters optimization of laser electrode patterning on ITO/Glass using multi-performance characteristics analysis

被引：0
|
作者：
Yang, Chih-Chung [1 ]
Hsiao, Wen-Tse [1 ]
Chung, Chien-Kai [1 ]
Tseng, Shih-Feng [1 ]
Huang, Kuo-Cheng [1 ]
Chen, Ming-Fei [2 ]
机构：
[1] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu, Taiwan
[2] Natl Chaughua Univ Educ, Dept Mechatron Engn, Changhua, Taiwan
来源：
PROCEEDINGS 2016 IEEE INTERNATIONAL CONFERENCE ON INDUSTRIAL TECHNOLOGY (ICIT) | 2016年
关键词：
Laser electrode patterning; ITO; multiple-performance characteristics; sheet resistance; optical transmittance; OXIDE THIN-FILMS; GREY RELATIONAL ANALYSIS; ITO; SUBSTRATE; ABLATION;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
The objective of this study was to obtain the optimal parameters for laser electrode patterning of indium-tin-oxide (ITO) films coated on soda lime glass substrates; the parameters were determined through grey relational analysis. The electrode patterning parameters affecting the sheet resistance and optical transmittance of the film include the laser power, pulse repetition frequency, pulse duration, and focus point position. Multiple performance characteristics associated with the sheet resistance and optical transmittance were investigated by conducting experiments. An infrared (1064 nm) laser system was used to directly fabricate electrode patterns on ITO films, and the characteristics of the patterned films were systematically analyzed using an ultraviolet-visible-near-infrared spectrophotometer and a four-point probe instrument. The data obtained from the experiments were analyzed to optimize the laser patterning parameters correlated with multiple performance characteristics.
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页码：1818 / 1822
页数：5
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