Magnetron Sputtering System for Fabrication of X-ray Multilayer Optics

被引：1

作者：

Nayak, M. ^{[1
]}

Rao, P. N. ^{[1
]}

Lodha, G. S. ^{[1
]}

机构：

[1] Raja Ramanna Ctr Adv Technol, Ind Synchrotrons Utilizat Div, Xray Opt Sect, Indore 452013, Madhya Pradesh, India

来源：

INDIAN VACUUM SOCIETY SYMPOSIUM ON THIN FILMS: SCIENCE & TECHNOLOGY | 2012年 / 1451卷

关键词：

Thin film deposition. Magnetron sputtering; X-ray multilayer optics; surface/interface analysis;

D O I：

10.1063/1.4732398

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A specially designed DC/RF magnetron sputtering system has been installed for the development of large area x-ray multilayer (ML) optics at Indus synchrotron radiation facility. A brief description of the system configuration, automation and operating conditions are presented. The system has the capability of fabricating large area (300x100 -mm(2)) X-ray MLs with required accuracy, uniformity and reproducibility. Thin film growth suitable for fabrication of X-ray ML optics has achieved by optimizing the sputtering process parameters. The representative results are presented.

引用

页码：154 / 156

页数：3

共 50 条

[1] HELICON PLASMA SPUTTERING SYSTEM FOR FABRICATION OF MULTILAYER X-RAY MIRRORS
KOIKE, M
CHIWAKI, M
SUZUKI, IH
KOBAYASHI, N
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (02): : 2141 - 2143
[2] Fabrication and performance of etched multilayer X-ray optics
Wang, ZS
Ma, YY
Cao, JL
Chen, YD
Xu, XD
Hong, YL
Fu, SJ
[J]. CRYSTAL AND MULTILAYER OPTICS, 1998, 3448 : 332 - 337
[3] Characterization of a magnetron sputtering system for the development of broadband x-ray optic multilayer coatings
Gurgew, Danielle
Broadway, David M.
Ramsey, Brian
[J]. OPTICS FOR EUV, X-RAY, AND GAMMA-RAY ASTRONOMY IX, 2019, 11119
[4] Characteristics of a carbon/nickel multilayer structure for soft X-ray optics deposited by RF magnetron-sputtering
Ulmeanu, M
Georgescu, G
Medianu, R
Nastase, N
Ghica, C
Vasiliu, V
[J]. FIFTH CONFERENCE ON OPTICS (ROMOPTO '97), PTS 1 AND 2, 1998, 3405 : 1137 - 1142
[5] Fabrication and characterization of multilayer supermirrors for hard X-ray optics
Yamashita, K
Akiyama, K
Haga, K
Kunieda, H
Lodha, GS
Nakajo, N
Nakamura, N
Okajima, T
Tamura, K
Tawara, Y
[J]. JOURNAL OF SYNCHROTRON RADIATION, 1998, 5 : 711 - 713
[6] Multilayer X-ray optics
Vinogradov, AV
[J]. QUANTUM ELECTRONICS, 2002, 32 (12) : 1113 - 1121
[7] MULTILAYER X-RAY OPTICS
JANKOWSKI, AF
BIONTA, RM
[J]. JOURNAL OF METALS, 1988, 40 (07): : A84 - A84
[8] FABRICATION AND TESTING OF LARGE AREA MULTILAYER COATED X-RAY OPTICS
SPILLER, E
GOLUB, L
[J]. APPLIED OPTICS, 1989, 28 (14): : 2969 - 2974
[9] Multilayer X-ray optics at CHESS
Kazimirov, A
Smilgies, DM
Shen, Q
Xiao, XH
Hao, Q
Fontes, E
Bilderback, DH
Gruner, SM
Platonov, Y
Martynov, VV
[J]. JOURNAL OF SYNCHROTRON RADIATION, 2006, 13 : 204 - 210
[10] Multilayer Soft X-Ray Optics
Falco, Charles M.
[J]. FIFTY YEARS OF OPTICAL SCIENCES AT THE UNIVERSITY OF ARIZONA, 2014, 9186

← 1 2 3 4 5 →