Real-time displacement measurement using VCSEL interferometer

被引：0
|
作者：
Suzuki, Takamasa [1 ]
Yamada, Noriaki [1 ]
Sasaki, Osami [2 ]
Choi, Samuel [2 ]
机构：
[1] Niigata Univ, Grad Sch Sci & Technol, 8050,Igarashi 2, Niigata 9502181, Japan
[2] Niigata Univ, Fac Engn, Niigata 9502181, Japan
来源：
OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II | 2012年 / 8563卷
关键词：
displacement sensor; laser diode; interferometer; vertical cavity surface emitting laser diode; LASER-DIODE INTERFEROMETER; FEEDBACK-CONTROL; PHASE; DISTURBANCE;
D O I：
10.1117/12.999720
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 mu m and 50 nm for displacements of 150 mu m and 1.2 mu m, respectively.
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页数：6
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