Liquid metal droplets for RF MEMS switches

被引：0
|
作者：
Chen, CH [1 ]
Peroulis, D [1 ]
机构：
[1] Purdue Univ, Sch Elect & Comp Engn Dept, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
来源：
2006 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS | 2006年
关键词：
MEMS; RF; liquid metal; electrostatic actuation;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper discusses the design, fabrication and characterization of microstructures for the manipulation of very small liquid-metal droplets. In particular we demonstrate the successful actuation of 50-mu m liquid-metal droplets with an actuation voltage of less than 70V Liquid contacts have the potential of increased power handling, which renders these structures good candidates for reliable high-power MEMS switches.
引用
收藏
页码：28 / +
页数：2
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