共 50 条
- [1] Real-time optics contamination monitoring using surface acoustic wave technology METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVIII, PTS 1 AND 2, 2004, 5375 : 1033 - 1038
- [2] Novel Digital Microfluidic System Using a Surface Acoustic Wave Device 2010 IEEE SENSORS, 2010, : 253 - 256
- [3] Laser inspection for surface acoustic wave performance in SAW device OPTICAL SENSORS AND BIOPHOTONICS II, 2011, 7990
- [4] Measurement of humidity using surface acoustic wave device Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1992, 31 (9 B): : 3070 - 3072
- [6] Temperature-control system for small droplet using surface acoustic wave device 2005 IEEE SENSORS, VOLS 1 AND 2, 2005, : 727 - 730
- [8] MEASUREMENT OF HUMIDITY USING SURFACE ACOUSTIC-WAVE DEVICE JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B): : 3070 - 3072
- [9] Micro linear motor using surface acoustic wave device ISIE 2002: PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS, VOLS 1-4, 2002, : 383 - 387
- [10] Wireless identification and sensing using Surface Acoustic Wave device MECHATRONICS '98, 1998, : 559 - 564