MEMS actuated spherical retroreflector for free-space optical communications

被引：12
|
作者：
Jenkins, C [1 ]
Johnstone, W
Uttamchandani, D
Handerek, V
Radcliffe, S
机构：
[1] Univ Strathclyde, Dept Elect & Elect Engn, Ctr Microsyst & Photon, Glasgow G1 1XW, Lanark, Scotland
[2] BAE SYST, Adv Technol Ctr, Chelmsford CM2 8HN, Essex, England
来源：
ELECTRONICS LETTERS | 2005年 / 41卷 / 23期
关键词：
D O I：
10.1049/el:20052449
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An optical MEMS retroreflective phase modulator comprising a silicon MEMS microactuated platform to which a spherical retroreflector is attached has been investigated. The steady state and dynamic behaviour of the MEMS modulator have been experimentally measured when two different sizes of spherical retroreflectors are used. Dynamic testing shows a dominant resonant frequency response at around 200 Hz, which matches finite-element analysis for the structure.
引用
收藏
页码：1278 / 1279
页数：2
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