Nonlinear Equivalent Circuit Model for Circular CMUTs in Uncollapsed and Collapsed Mode

被引：1
|
作者：
Aydogdu, Elif [1 ]
Ozgurluk, Alper [1 ]
Oguz, H. Kagan [1 ]
Atalar, Abdullah [1 ]
Kocabas, Coskun
Koymen, Hayrettin [1 ]
机构：
[1] Bilkent Univ, Elect & Elect Engn Dept, TR-06800 Ankara, Turkey
来源：
2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2012年
关键词：
D O I：
10.1109/ULTSYM.2012.0247
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An equivalent electrical circuit model valid for collapsed mode operation of CMUT is described. The across and through variables of the circuit model are chosen to be rms force and rms displacement over the surface of the CMUT membrane. The relation between rms displacement and applied voltage is obtained through analytical calculations utilizing the exact force distribution. The radiation impedance of collapsed mode CMUT is included as a load impedance in the circuit model. The resulting equivalent circuit is merged with uncollapsed mode model, to obtain a simulation tool that covers the whole operation range of CMUT.
引用
收藏
页码：987 / 990
页数：4
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