Patterning of substrates using surface relief structures on an azobenzene-functionalized polymer film

被引：20
|
作者：
Yang, SZ [1 ]
Yang, K
Niu, LG
Nagarajan, R
Bian, SP
Jain, AK
Kumar, J
机构：
[1] Univ Massachusetts, Dept Phys, Ctr Adv Mat, Lowell, MA 01854 USA
[2] Univ Massachusetts, Dept Chem, Ctr Adv Mat, Lowell, MA 01854 USA
来源：
ADVANCED MATERIALS | 2004年 / 16卷 / 08期
关键词：
D O I：
10.1002/adma.200306537
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A maskless method for patterning substrates using surface relief structures on azobenzene-functionalized polymer is demonstrated. Surface relief structures are inscribed on a polymer film spin-coated on an indium tin oxide (ITO) substrate by exposure to an interference pattern. Etching with oxygen plasma followed by a zinc-powder-catalyzed liquid etchant yields a periodically patterned ITO substrate (see Figure).
引用
收藏
页码：693 / +
页数：5
相关论文
共 50 条
  • [1] Patterning flexible substrates using surface relief structures in azobenzene functionalized polymer films
    Yang, Suizhou
    Yang, Ke
    Jain, Aloke
    Nagarajan, Ramaswamy
    Kumar, Jayant
    [J]. JOURNAL OF MACROMOLECULAR SCIENCE PART A-PURE AND APPLIED CHEMISTRY, 2008, 45 (11): : 938 - 941
  • [2] Photolithographic periodic patterning of gold using azobenzene-functionalized polymers
    Kravchenko, Aleksandr
    Shevchenko, Andriy
    Grahn, Patrick
    Ovchinnikov, Victor
    Kaivola, Matti
    [J]. THIN SOLID FILMS, 2013, 540 : 162 - 167
  • [3] Photo-alignment material with azobenzene-functionalized polymer linked in film
    Watanabe, H
    Miyagawa, N
    Takahara, S
    Yamaoka, T
    [J]. POLYMERS FOR ADVANCED TECHNOLOGIES, 2002, 13 (07) : 558 - 565
  • [4] On the inscription of period and half-period surface relief gratings in azobenzene-functionalized polymers
    Sobolewska, Anna
    Miniewicz, Andrzej
    [J]. JOURNAL OF PHYSICAL CHEMISTRY B, 2008, 112 (15): : 4526 - 4535
  • [5] Application of Surface Relief Hologram Using Azobenzene Containing Polymer Film
    Kenji Harada
    Masahide Itoh
    Toyohiko Yatagai
    Shun-ichi Kamemaru
    [J]. Optical Review, 2005, 12 : 130 - 134
  • [6] Application of surface relief hologram using azobenzene containing polymer film
    Harada, K
    Itoh, M
    Yatagai, T
    Kamemaru, S
    [J]. OPTICAL REVIEW, 2005, 12 (02) : 130 - 134
  • [7] Large near-resonance third-order nonlinearity in an azobenzene-functionalized polymer film
    Rangel-Rojo, R
    Yamada, S
    Matsuda, H
    Yankelevich, D
    [J]. APPLIED PHYSICS LETTERS, 1998, 72 (09) : 1021 - 1023
  • [8] Enhanced photofabrication of a surface nanostructure on azobenzene-functionalized polymer films with evaporated gold nanoislands
    Hasegawa, M
    Keum, CD
    Watanabe, O
    [J]. ADVANCED MATERIALS, 2002, 14 (23) : 1738 - +
  • [9] Photoresponse gas permeability of azobenzene-functionalized glassy polymer films
    Kameda, M
    Sumaru, K
    Kanamori, T
    Shinbo, T
    [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 2003, 88 (08) : 2068 - 2072
  • [10] Photoinduced fabrication of complex surface relief structures on azobenzene functionalized polymers
    J Kumar
    L Li
    Nirmal K Viswanathan
    S Bian
    S Balasubramanian
    D Y Kim
    S K Tripathy
    [J]. Bulletin of Materials Science, 1999, 22 : 443 - 445
12345