Nanobolometer: Silicon-based Uncooled Multi-Spectral IR Detector

被引:1
|
作者
Lee, Hyesog [1 ]
Verma, Ravi [1 ]
机构
[1] Tanner Res Inc, Monrovia, CA 91016 USA
关键词
IR detector; multi-spectral; optical resonance; nanoparticle; uncooled; bolometer; ARRAYS;
D O I
10.1117/12.920765
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
By utilizing the band-selective nature of optically resonant nanoparticles, Tanner Research is developing a room temperature multi-spectral IR detection technology termed Nanobolometer. Because the device physics is not based on photodiode/photoconductive (cooled IR detectors) operation, it does not require cooling. It is also not a heat sensing (Microbolometers) scheme and is capable of multi-spectral detection from NIR to LWIR. A nanobolometer is built on a Si substrate for the entire detection bands (NIR-LWIR), which enables low material and fabrication costs, with an added advantage of being able to integrate UV/Vis detector pixels in the same platform. We present the theory and working principle of Tanner's Nanobolomter technology and report a proof-of-concept demonstration that achieved IR detection at 1.5 mu m. Tanner's on-going R&D effort aims to extend the detection bands to MWIR/LWIR.
引用
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页数:6
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