Porous Silicon Structures as Optical Gas Sensors

被引:92
|
作者
Levitsky, Igor A. [1 ]
机构
[1] Emitech Inc, Fall River, MA 02720 USA
关键词
porous silicon; gas sensors; optical; sensor arrays; multiparametric; CHEMICAL-MODIFICATION; PHOTONIC CRYSTALS; POLYMER-FILMS; SMART DUST; MICROCAVITIES; SURFACE; VAPORS; PHOTOLUMINESCENCE; INTERFEROMETRY; NANOSTRUCTURES;
D O I
10.3390/s150819968
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We present a short review of recent progress in the field of optical gas sensors based on porous silicon (PSi) and PSi composites, which are separate from PSi optochemical and biological sensors for a liquid medium. Different periodical and nonperiodical PSi photonic structures (bares, modified by functional groups or infiltrated with sensory polymers) are described for gas sensing with an emphasis on the device specificity, sensitivity and stability to the environment. Special attention is paid to multiparametric sensing and sensor array platforms as effective trends for the improvement of analyte classification and quantification. Mechanisms of gas physical and chemical sorption inside PSi mesopores and pores of PSi functional composites are discussed.
引用
收藏
页码:19968 / 19991
页数:24
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