CMOS-ON-LTCC INTEGRATED FINGERTIP SENSOR WITH 3-AXIS TACTILE AND THERMAL SENSATION FOR ROBOTS

被引：0

作者：

Asano, Sho ^{[1
]}

Muroyama, Masanori ^{[1
]}

Nakayama, Takahiro ^{[2
]}

Hata, Yoshiyuki ^{[3
]}

Tanaka, Shuji ^{[1
]}

机构：

[1] Tohoku Univ, Sendai, Miyagi, Japan

[2] Toyota Motor Co Ltd, Toyota, Aichi, Japan

[3] Toyota Cent Res & Dev Labs Inc, Nagakute, Aichi, Japan

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

关键词：

Tactile sensor; MEMS-CMOS integration; Capacitive force sensor; Thermal sensing; Sensor platform LSI; Low temperature cofired ceramic (LTCC); Fingertip sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a fully-integrated, small-footprint fingertip sensor, which allows robots to have 3-axis tactile and thermal sensation. The 3-axis capacitive force sensor is integrated with our original sensor platform CMOS-LSI (sensor platform LSI) including a diode-based temperature sensor. The LSI offers flexible configurability, and the force sensitivity and the sample rate were configured for this fingertip application. The materials of objects were successfully identified by measuring temperature change under the control of contact force. Fitting by a theoretical thermal model was conducted to extract contact resistance, thermal conductivity and thermal capacitance.

引用

页码：516 / 519

页数：4

共 24 条

[1] 3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer
Asano, Sho
Muroyama, Masanori
Nakayama, Takahiro
Hata, Yoshiyuki
Nonomura, Yutaka
Tanaka, Shuji
[J]. SENSORS, 2017, 17 (11):
[2] 3-AXIS TACTILE SENSOR AND RECOGNITION METHOD
OHKA, M
[J]. JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 1995, 40 (06) : 506 - 511
[3] CMOS 3-axis accelerometers with integrated amplifier
Kruglick, EJJ
Warneke, BA
Pister, KSJ
[J]. MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, : 631 - 636
[4] 3-AXIS ALL ELASTOMER MEMS TACTILE SENSOR
Charalambides, Alexi
Cheng, Jian
Li, Teng
Bergbreiter, Sarah
[J]. 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015, : 726 - 729
[5] 3-Axis Contact Force Fingertip Sensor Based on Hall Effect Sensor
Rakovic, Mirko
Beronja, Miroslav
Batinica, Aleksandar
Nikolic, Milutin
Borovac, Branislav
[J]. ADVANCES IN ROBOT DESIGN AND INTELLIGENT CONTROL, 2017, 540 : 88 - 95
[6] CMOS Implementation of a 3-axis Thermal Convective Accelerometer
Mailly, Frederick
Huy Binh Nguyen
Latorre, Laurent
Nouet, Pascal
[J]. 2014 IEEE SENSORS, 2014,
[7] A "MICRO-MACRO" INTEGRATED PLANAR MEMS TACTILE SENSOR FOR PRECISE MODELING AND MEASUREMENT OF FINGERTIP SENSATION
Watatani, Kazuki
Kozai, Ryogo
Terao, Kyohei
Shimokawa, Fusao
Takao, Hidekuni
[J]. 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 223 - 226
[8] Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer
Xie, HK
Fedder, GK
Pan, ZY
Frey, W
[J]. NANOTECH 2003, VOL 1, 2003, : 292 - 295
[9] Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer
Xie, HK
Fedder, GK
Pan, ZY
Frey, W
[J]. NANOTECH 2003, VOL 2, 2003, : 420 - 423
[10] 3-AXIS FULLY-INTEGRTED SURFACE-MOUNTABLE DIFFERENTIAL CAPACITIVE TACTILE SENSOR BY CMOS FLIP-BONDING
Asano, Sho
Muroyama, Masanori
Bartley, Travis
Nakayama, Takahiro
Yamaguchi, Ui
Yamada, Hitoshi
Hata, Yoshiyuki
Nonomura, Yutaka
Tanaka, Shuji
[J]. 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2016, : 850 - 853

← 1 2 3 →