A Finite Element Simulation of the Propagation Properties Shear Surface Acoustic Wave Devices

被引：1

作者：

Cao, Pei ^{[1
]}

Zhu, Jialin ^{[1
]}

Huang, Xiaolin ^{[1
]}

Gao, Jingmin ^{[1
]}

机构：

[1] Beijing Informat Sci & Technol Univ, Beijing Key Lab Sensor, Beijing, Peoples R China

来源：

2012 FIFTH INTERNATIONAL SYMPOSIUM ON COMPUTATIONAL INTELLIGENCE AND DESIGN (ISCID 2012), VOL 2 | 2012年

关键词：

shear SAW; Love wave; ST-90 degrees X quartz wafer; propagation properties; ANSYS simulation;

D O I：

10.1109/ISCID.2012.182

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

In this paper, the propagation properties of Love wave are analyzed from the wave equation of Love wave. According to the condition of generating Love wave, the model using ST-90 degrees X quartz wafer as substrate and SiO2 as overlay is simulated by ANSYS finite element software. The various velocities are calculated by the data of various modes, then the diagram of the velocity and frequency is drawn using the Lagrange interpolation function, which can prove the dispersion characteristics of Love wave. The Love wave device with 83MHz center frequency is designed according to the relationship between velocity and frequency, and its insertion loss is 10dB. The velocity of Love wave at 83MHz is calculated as 4922m/s according to the period of Interdigital transducer (IDT) and the amplitude-frequency characteristics measured by network analyzer, which is consistent with the simulation results.

引用

页码：119 / 122

页数：4

共 50 条

[1] A finite element simulation of the surface acoustic wave devices based on polarized piezoelectric ceramic
Cao, Pei
Zhu, Jia-Lin
Advanced Materials Research, 2013, 721 : 483 - 487
[2] Finite element simulation of bulk- and surface acoustic wave (SAW) interaction in SAW devices
Hofer, M
Finger, N
Kovacs, G
Schöberl, J
Langer, U
Lerch, R
2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2002, : 53 - 56
[3] Finite element simulation of acoustic wave propagation within flowing media
Eccardt, PC
Landes, H
Lerch, R
1996 IEEE ULTRASONICS SYMPOSIUM, PROCEEDINGS, VOLS 1 AND 2, 1996, : 991 - 994
[4] Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL
Koigerov, A.S.
Korlyakov, A.V.
Russian Microelectronics, 2022, 51 (04) : 226 - 235
[5] Finite Element Modeling of Surface Acoustic Wave Devices Using COMSOL
Koigerov A.S.
Korlyakov A.V.
Russian Microelectronics, 2022, 51 (4) : 226 - 235
[6] Numerical Simulation of Ultrasonic Shear Wave Propagation Based on the Finite Element Method
Ma Jian
Zhao Yang
Sun JiHua
Liu Shuai
MATERIALS SCIENCE, CIVIL ENGINEERING AND ARCHITECTURE SCIENCE, MECHANICAL ENGINEERING AND MANUFACTURING TECHNOLOGY, PTS 1 AND 2, 2014, 488-489 : 926 - 929
[7] Enhancing effects of microcavities on shear-horizontal surface acoustic wave sensors: A finite element simulation study
Cular, Stefan
Sankaranarayanan, Subramanian K. R. S.
Bhethanabotla, Venkat R.
APPLIED PHYSICS LETTERS, 2008, 92 (24)
[8] Simulation of surface acoustic wave devices
Hashimoto, Ken-ya
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (5B): : 4423 - 4428
[9] Simulation of surface acoustic wave devices
Yu, SD
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2004, 51 (05) : 616 - 623
[10] Simulation of surface acoustic wave devices
Hashimoto, Ken-Ya
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2006, 45 (5 B): : 4423 - 4428

← 1 2 3 4 5 →