HIGH-SPEED ELECTROSTATIC MICRO-HYDRAULICS FOR SENSING AND ACTUATION

被引：0
|
作者：
Sadeghi, Mahdi M. [1 ]
Peterson, Rebecca L. [1 ]
Najafi, Khalil [1 ]
机构：
[1] Univ Michigan, Ctr Wireless Integrated Micro Sensing & Syst WIMS, Ann Arbor, MI 48109 USA
来源：
26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013) | 2013年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we report a novel architecture for significant performance enhancement of previously introduced electrostatic micro-hydraulic structures. We develop a 2-D multi-physics model for analysis of our first generation electrostatic micro-hydraulic system (straight-wall architecture) used for sensing and actuation. Using this model, we design and fabricate a new sloped-wall device with a time constant 400x less than that of earlier designs, while maintaining other specification. The optimized electrostatic micro-hydraulic systems are successfully fabricated and tested. Micro-hydraulic structures of various geometries exhibit a measured bandwidth of 50 to 70 Hz, which corresponds to a sensor response time of about 18 ms.
引用
收藏
页码：1191 / 1194
页数：4
相关论文
共 50 条
  • [1] HIGH-SPEED HYDRAULICS CHALLENGE MECHANICALS
    不详
    [J]. METALWORKING PRODUCTION, 1977, 121 (10) : 59 - 59
  • [2] A multifunctional soft robotic shape display with high-speed actuation, sensing, and control
    Johnson, B. K.
    Naris, M.
    Sundaram, V.
    Volchko, A.
    Ly, K.
    Mitchell, S. K.
    Acome, E.
    Kellaris, N.
    Keplinger, C.
    Correll, N.
    Humbert, J. S.
    Rentschler, M. E.
    [J]. NATURE COMMUNICATIONS, 2023, 14 (01)
  • [3] A multifunctional soft robotic shape display with high-speed actuation, sensing, and control
    B. K. Johnson
    M. Naris
    V. Sundaram
    A. Volchko
    K. Ly
    S. K. Mitchell
    E. Acome
    N. Kellaris
    C. Keplinger
    N. Correll
    J. S. Humbert
    M. E. Rentschler
    [J]. Nature Communications, 14
  • [4] Photothermal high-speed crystal actuation and the simulation
    Hasebe, S.
    Hagiwara, Y.
    Komiya, J.
    Ryu, M.
    Fujisawa, H.
    Morikawa, J.
    Katayama, T.
    Yamanaka, D.
    Furube, A.
    Sato, H.
    Asahi, T.
    Koshima, H.
    [J]. ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2021, 77 : C986 - C986
  • [5] Conceptual Design of Micro-Hydraulics System for Active and Biopsy Capsule Endoscope Robot
    Leon-Rodriguez, Hernando
    Lee, Cheong
    Ha, Le Viet
    Ko, Seong Young
    Park, Jong-Oh
    Park, Sukho
    [J]. 2014 5TH IEEE RAS & EMBS INTERNATIONAL CONFERENCE ON BIOMEDICAL ROBOTICS AND BIOMECHATRONICS (BIOROB), 2014, : 1068 - 1072
  • [6] HIGH-SPEED FACSIMILE WITH ELECTROSTATIC RECORDING
    HAYASHI, T
    KOBAYASHI, K
    SAWADA, G
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1972, ED19 (04) : 543 - +
  • [7] Reversible High-Speed Electrostatic "Contact"
    Baginsky, I. L.
    Kostsov, E. G.
    [J]. SEMICONDUCTORS, 2010, 44 (13) : 1654 - 1657
  • [8] HIGH-SPEED DEVELOPMENT OF ELECTROSTATIC IMAGES
    KOFFERLEIN, R
    [J]. JOURNAL OF PHOTOGRAPHIC SCIENCE, 1977, 25 (05): : 222 - 224
  • [9] Reversible high-speed electrostatic “contact”
    I. L. Baginsky
    E. G. Kostsov
    [J]. Semiconductors, 2010, 44 : 1654 - 1657
  • [10] HIGH-SPEED ELECTROSTATIC RECORDING FOR FACSIMILES
    KIMURA, M
    KONDO, I
    HORIE, M
    [J]. FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 1981, 17 (01): : 73 - 86
12345