A fiber-tip Fabry-Perot pressure sensor with graphene diaphragm

被引:1
|
作者
Ma, Jun [1 ]
Jin, Wei [1 ]
Ho, Hoi Lut [1 ]
机构
[1] Hong Kong Polytech Univ, Dept Elect Engn, Hong Kong, Hong Kong, Peoples R China
关键词
optical fiber sensor; graphene diaphragm; fiber tip sensor; Fabry-Perot interferometer; pressure sensor;
D O I
10.1117/12.975124
中图分类号
TP7 [遥感技术];
学科分类号
081102 ; 0816 ; 081602 ; 083002 ; 1404 ;
摘要
A miniature fiber-tip pressure sensor was built by using an extremely thin graphene film as the diaphragm. The graphene also acts as a light reflector which, in conjunction with reflection at the fiber end/air interface, forms a low fineness Fabry-Perot cavity. The graphene-based micro-cavity sensor demonstrated a pressure sensitivity of similar to 34.8 nm/kPa with a diaphragm diameter of similar to 25 mu m, nearly two orders of magnitude higher than previously reported sensors with similar diaphragm diameters.
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页数:4
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