Stacked two dimensional micro-lens scanner for Micro Confocal Imaging array

The concept of Micro Confocal Imaging array is proposed and a stacked two-dimensional microlens scanner has been developed. The 2D raster scanner consists of two ID scanners fabricated in silicon on insulator wafers stacked perpendicularly. Each scanner has a biconvex surface tension induced polymer microlens. Line scanning ranging 75mum at 4.5kHz and 2D raster scanning over an area of 40mum x 40mum are demonstrated at the focal point of the lens, which is equivalent to a maximum of 11degrees beam steering.