Systems engineering for planar-integrated free-space optics

被引：0
|
作者：
Sinzinger, S [1 ]
机构：
[1] Fern Univ Hagen, Opt Nachrichtentech, D-58084 Hagen, Germany
来源：
MICRO- AND NANO-OPTICS FOR OPTICAL INTERCONNECTION AND INFORMATION PROCESSING | 2001年 / 4455卷
关键词：
microoptical integration; planar optics; optical design; microoptical systems engineering;
D O I：
10.1117/12.450447
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Planar optics is a promising approach to the integration of free-space optical systems.(1) From a systems perspective we discuss the processing steps and tools necessary for the engineering and fabrication of planar optical systems. These contain layout and simulation of the integrated free-space optical systems, generation of lithographic masks, and systems fabrication. We present integrated planar-optical systems for applications in optical interconnects, optical security and signal processing systems, as well as optical sensors.
引用
收藏
页码：256 / 263
页数：8
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