Absolute distance measurement using synthetic wavelength interferometry of optical frequency combs

被引:0
|
作者
Wu, Guanhao [1 ]
Liao, Lei [1 ]
机构
[1] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instrument, Beijing 100084, Peoples R China
关键词
AIR;
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a synthetic-wavelength based heterodyne interferometer of optical frequency combs with wide dynamic measurement range for absolute distance measurement, which can realize an accuracy of 75 nm in 350 mm distance measurement.
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页数:2
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