New ways of measuring the pull-in voltage and transient behavior of parallel-plate capacitive MEMS transducers

被引：0
|
作者：
Glacer, C. [1 ,2 ]
Dehe, A. [2 ]
Nawaz, M. [2 ]
Kolb, C. [2 ]
Laur, R. [1 ]
机构：
[1] Univ Bremen, Inst Electromagnet Theory & Microelect ITEM, D-28359 Bremen, Germany
[2] Infineon Technol AG, Neubiberg Munich, Germany
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2013年 / 23卷 / 08期
关键词：
D O I：
10.1088/0960-1317/23/8/085025
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we introduce two new ways of measuring the pull-in voltage and the transient behavior of parallel-plate capacitive microelectromechanical systems (MEMS) transducers. The advantages in the measurement speed and resolution of the so-called fast MEMS test will be discussed. Also an enhanced method, the time-resolved dynamic measurement, will be shown. With the second method, we can visualize the integral displacement of a membrane while measuring the voltage drop of a high-frequency signal over a shunt resistor/capacitor. With a more advanced charge amplifier circuit, also a force-free resonance measurement of the membrane and electrode is possible in one step. All this offers a robust and cheap option for tracing moving structures without the need of an optical line of sight.
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页数：8
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