Test structures applied to the rapid prototyping of sensors

被引：0
|
作者：
Buehler, MG
Cheng, LJ
Martin, DP
机构：
来源：
1997 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES - PROCEEDINGS | 1997年
关键词：
D O I：
10.1109/ICMTS.1997.589406
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A multi-project ceramic substrate was used in developing a gas sensor and pressure sensor. The co-fired ceramic substrate contained 36 chips with six variants including sensors, process control monitors, and an interconnect chip. The gas sensor is being developed as an air quality monitor for the Space Shuttle and the pressure gauge as a Martian barometer. This effort is in its initial phase. The test structures were used to identify problems and to point to solutions.
引用
收藏
页码：212 / 218
页数：7
相关论文
共 50 条
  • [1] Test structures for rapid prototyping of gas and pressure sensors
    Buehler, MG
    Cheng, LJ
    Martin, DP
    [J]. 1996 INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT, 1996, : 72 - 76
  • [2] Rapid Prototyping and Test before Silicon of Integrated Pressure Sensors
    Voinea, Adrian I.
    Kampfer, Stefan
    [J]. 2015 IEEE INTERNATIONAL TEST CONFERENCE (ITC), 2015,
  • [3] Inertial sensors rapid prototyping for automotive application
    Massimiliano, Melani
    Francesco, D'Ascoli
    Luca, Fanucci
    Francesco, Lozzi
    Adolf, Gianbastiani
    Alessandro, Rocchi
    Marco, De Marinis
    [J]. 2007 2ND INTERNATIONAL WORKSHOP ON ADVANCES IN SENSORS AND INTERFACE, 2007, : 173 - +
  • [4] Case study of a rapid prototyping method for optimizing soft gripper structures with integrated piezoresistive sensors
    Georgopoulou, Antonia
    Eckey, Louisa Marie
    Mondal, Somashree
    Clemens, Frank
    [J]. 2022 IEEE 5TH INTERNATIONAL CONFERENCE ON SOFT ROBOTICS (ROBOSOFT), 2022, : 539 - 544
  • [5] Optimization and Rapid Prototyping of Catadioptric Omnidirectional Stereo Sensors
    Tripp, Bryan
    Singh, Sanjay
    Selby, Ben
    [J]. JOURNAL OF INTELLIGENT & ROBOTIC SYSTEMS, 2017, 86 (3-4) : 467 - 483
  • [6] CNC Machining of Lithium Niobate for Rapid Prototyping of Sensors
    Al-Shibaany, Zeyad Yousif Abdoon
    Choong, Zi Jie
    Huo, Dehong
    Hedley, John
    Hu, Zhongxu
    [J]. 2015 IEEE SENSORS, 2015, : 442 - 445
  • [7] Optimization and Rapid Prototyping of Catadioptric Omnidirectional Stereo Sensors
    Bryan Tripp
    Sanjay Singh
    Ben Selby
    [J]. Journal of Intelligent & Robotic Systems, 2017, 86 : 467 - 483
  • [8] Rapid prototyping and rapid tooling applied in product development of ceramic components
    Lino, FJ
    Neto, RJL
    Paiva, R
    Moreira, A
    [J]. ADVANCED MATERIALS FORUM II, 2004, 455-456 : 835 - 838
  • [9] INTRODUCTION OF RAPID PROTOTYPING IN SOLVING APPLIED PROBLEMS IN PRODUCTION
    Brykin, Veniamin A.
    Voroshilin, Anton P.
    Ripetskiy, Andrey, V
    Uhov, Petr A.
    [J]. PERIODICO TCHE QUIMICA, 2020, 17 (35): : 354 - 366
  • [10] Quantum Mechanical–Rapid Prototyping Applied to Methane Activation
    Richard P. Muller
    Dean M. Philipp
    William A. Goddard
    [J]. Topics in Catalysis, 2003, 23 : 81 - 98
12345