Full field X-ray nano-imaging at SSRF

被引:1
|
作者
Deng, Biao [1 ]
Ren, Yuqi [1 ]
Wang, Yudan [1 ]
Du, Guohao [1 ]
Xie, Honglan [1 ]
Xiao, Tiqiao [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai, Peoples R China
关键词
Full field X-ray nano-imaging; Synchrotron radiation; Beam shaper; OXIDE FUEL-CELL;
D O I
10.1117/12.2035589
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Full field X-ray nano-imaging focusing on material science is under developing at SSRF. A dedicated full field X-ray nano-imaging beamline based on bending magnet will be built in the SSRF phase-II project. The beamline aims at the 3D imaging of the nano-scale inner structures. The photon energy range is of 5-14keV. The design goals with the field of view (FOV) of 20 mu m and a spatial resolution of 20nm are proposed at 8 keV, taking a Fresnel zone plate (FZP) with outermost zone width of 25 nm. Futhermore, an X-ray nano-imaging microscope is under developing at the SSRF BL13W beamline, in which a larger FOV will be emphasized. This microscope is based on a beam shaper and a zone plate using both absorption contrast and Zernike phase contrast, with the optimized energy set to 10keV. The detailed design and the progress of the project will be introduced.
引用
收藏
页数:6
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