Design aspects of electrostatically driven MEMS adaptive mirror

被引：0
|
作者：
Kumar, Shailesh [1 ]
Gupta, Amita [1 ]
机构：
[1] Solid State Phys Lab, Delhi 110054, India
来源：
16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES | 2012年 / 8549卷
关键词：
membrane deformation; natural frequency; stroke; DEFORMABLE MIRRORS; OPTICS;
D O I：
10.1117/12.925110
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Adaptive mirrors are used in modern adaptive optics systems for direct correction of aberration in a wave front. Silicon nitride membranes are widely used in the fabrication of MEMS deformable mirror In this paper, we have studied the design and simulation aspects of MEMS based electrostatically actuated continuous membrane adaptive mirror. We have studied the effect of several factors e. g. thickness and size of mirror membrane, size of bottom electrodes & voltage applied between top & bottom electrodes on response of the mirror.
引用
收藏
页数：7
相关论文
共 50 条
  • [1] Design and Fabrication of Electrostatically Driven In-Plane MEMS Rotational Mirror with Electrostatic Rotary Encoder
    Shinozaki, R.
    Oohira, F.
    Terao, K.
    Suzuki, T.
    Simokawa, F.
    Takao, H.
    2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2012, : 107 - 108
  • [2] Design optimization of an electrostatically driven micro scanning mirror
    Schenk, H
    Wolter, A
    Lakner, H
    MOEMS AND MINIATURIZED SYSTEMS II, 2001, 4561 : 35 - 44
  • [3] A Position Feedback Solution based on the Acoustic Signal Produced by Electrostatically Driven MEMS Scanning Mirror
    Xia, Changfeng
    Qiao, Dayong
    Zhang, Yalong
    Su, Xiaocao
    Guo, Zhounan
    2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017, : 558 - 561
  • [4] Impedance spectroscopy of electrostatically driven MEMS resonators
    Kwoka, Krzysztof
    Piasecki, Tomasz
    Orlowska, Karolina
    Grabarczyk, Paulina
    Sierakowski, Andrzej
    Gotszalk, Teodor
    Gacka, Ewelina
    Piejko, Adrianna
    Gajewski, Krzysztof
    MEASUREMENT, 2023, 215
  • [5] DESIGN ASPECTS OF A MEMS BASED BI-AXIAL MIRROR
    Meena, Aklesh Kumar
    Singh, Ranvir
    Parmar, Yashoda
    Gond, Vinita
    Islam, M.
    Gupta, Amita
    PHYSICS OF SEMICONDUCTOR DEVICES, 2014, : 429 - 432
  • [6] Design of electrostatically actuated MEMS switches
    Lai, Yeong-Lin
    Chang, L. -H.
    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2008, 313 : 469 - 473
  • [7] Resonant Adaptive MEMS Mirror
    Kamel, Amr
    Kocer, Samed
    Mukhangaliyeva, Lyazzat
    Saritas, Resul
    Gulsaran, Ahmet
    Elhady, Alaa
    Basha, Mohamed
    Hajireza, Parsin
    Yavuz, Mustafa
    Abdel-Rahman, Eihab
    ACTUATORS, 2022, 11 (08)
  • [8] Novel adaptive optics system with an electrostatically-driven deformable mirror and wavefront compensation algorithm
    Kobayashi, Akio
    Kawashima, Hiroyuki
    Saito, Noriko
    Momiuchi, Masayuki
    Koga, Akihiro
    Furukawa, Ryo
    Masunishi, Kei
    2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2007, : 105 - 106
  • [9] A Dual-Axis Electrostatically Driven MEMS Microgripper
    Jia, Yukun
    Jia, Minping
    Xu, Qingsong
    INTERNATIONAL JOURNAL OF ADVANCED ROBOTIC SYSTEMS, 2014, 11
  • [10] MEMS Electrostatically Driven Coupled Beam Filter Banks
    Syms, Richard
    Bouchaala, Adam
    MICROMACHINES, 2023, 14 (12)
12345