On-line Identification for Cantilevered Electromagnetic Actuators with Pull-in Instability using Oscillatory Input Stabilization

被引:0
|
作者
Nonaka, Kenichiro [1 ]
Suzuki, Tatsuya [2 ]
机构
[1] Tokyo City Univ, Fac Engn, Dept Mech Syst Engn, Setagaya Ku, 1-28-1 Tamazutsumi, Tokyo 1588557, Japan
[2] Saginomiya Seisakusho Inc, Tokyo, Japan
关键词
CHARGE CONTROL; MEMS;
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
Accurate model is indispensable for high precision control of gap-closing actuators driven by electromagnetic / electrostatic force. For these actuators, it is not easy to identify the precise model all along the motion range, because its mobility region is severely limited due to the pull-in instability. In this paper, an on-line identification method for gap-closing actuators is presented which enables us to stabilize the actuators using oscillatory stabilization so that the electromagnetic force can be identified even in the pull-in instability region. Both simulation and experimental results indicate that the proper model is obtained through the proposed method.
引用
收藏
页码:804 / 809
页数:6
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