Background subtraction practice in X-ray reflectivity reciprocal space mapping and its influence on the structural parameters of thin films

被引：1
|
作者：
Fouzri, A. [1 ]
Salah, F. [1 ]
Mtiraoui, N. [1 ]
Harzallah, B. [1 ]
Oumezzine, M. [1 ]
机构：
[1] Univ Monastir, Fac Sci Monastir, Unite Serv Commun Rech High Resolut Xray Diffract, Lab Phys Chim Mat,Dept Phys, Monastir 5019, Tunisia
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2012年 / 55卷 / 01期
关键词：
REFLECTOMETRY; NEUTRON;
D O I：
10.1134/S0020441211060248
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Background subtraction practice in X-ray reflectivity reciprocal space mapping (XRRSM) is described and compared to the traditional specular reflectivity. XRRSM allows determining a more precise contribution of background to the reflectivity signal which manifests itself in an improvement of the resolution of interference fringes. Data analysis and influence of background subtraction determined by two methods on the structural parameters of thin film are discussed using simulated X-ray reflectivity.
引用
收藏
页码：96 / 103
页数：8
相关论文
共 50 条
  • [1] Background subtraction practice in X-ray reflectivity reciprocal space mapping and its influence on the structural parameters of thin films
    A. Fouzri
    F. Salah
    N. Mtiraoui
    B. Harzallah
    M. Oumezzine
    [J]. Instruments and Experimental Techniques, 2012, 55 : 96 - 103
  • [2] X-ray reflectivity reciprocal space mapping of strained SiGe/Si superlattices
    Holy, V
    Darhuber, AA
    Stangl, J
    Bauer, G
    Nutzel, JF
    Abstreiter, G
    [J]. NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1997, 19 (2-4): : 419 - 428
  • [3] Structural investigations of shadow masks by means of x-ray reciprocal space mapping
    Ress, HR
    Gerhard, T
    Schumacher, C
    Hock, V
    Li, M
    Korn, M
    Faschinger, W
    Landwehr, G
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (10A) : A26 - A31
  • [4] Structural characterization of thin hydroxypropylcellulose films. X-ray reflectivity studies
    Evmenenko, G
    Yu, CJ
    Kewalramani, S
    Dutta, P
    [J]. LANGMUIR, 2004, 20 (05) : 1698 - 1703
  • [5] Complementary neutron and X-ray reflectivity for structural characterization of porous thin films
    Huang, Yu-Shan
    Jeng, U-Ser
    Hsu, Chia-Hung
    Torikai, Naoya
    Lee, Hsin-Yi
    Shin, Kwanwoo
    Hino, Masahiro
    [J]. PHYSICA B-CONDENSED MATTER, 2006, 385 : 667 - 669
  • [6] X-ray diffraction and X-ray reflectivity applied to investigation of thin films
    Rafaja, D
    [J]. ADVANCES IN SOLID STATE PHYSICS 41, 2001, 41 : 275 - 286
  • [7] High resolution x-ray reciprocal space mapping
    Bauer, G
    Li, JH
    Holy, V
    [J]. ACTA PHYSICA POLONICA A, 1996, 89 (02) : 115 - 127
  • [8] X-ray reflectivity study of thin organic films
    Basu, JK
    Sanyal, MK
    Datta, A
    [J]. RADIATION PHYSICS AND CHEMISTRY, 1998, 51 (4-6) : 541 - 542
  • [9] X-ray diffraction reciprocal space mapping study of the thin film phase of pentacene
    Yoshida, Hiroyuki
    Inaba, Katsuhiko
    Sato, Naoki
    [J]. APPLIED PHYSICS LETTERS, 2007, 90 (18)
  • [10] Structural modulation on multilayered bismuth cuprate observed by x-ray reciprocal space mapping
    [J]. Kaneko, S. (satoru@kanagawa-iri.go.jp), 1600, American Institute of Physics Inc. (97):
12345