Zinc oxide films prepared by spray pyrolysis

被引:2
|
作者
Maciag, Andrzej [1 ]
Sagan, Piotr [1 ]
Kuzma, Marian [1 ]
Popovych, Volodymyr [2 ]
机构
[1] Univ Rzeszow, Ctr Innovat & Transfer Nat Sci & Engn Knowledge, S Pigonia 1, PL-35959 Rzeszow, Poland
[2] Ivan Franko Drogobych State Pedag Univ, Dept Fundamental Technol, 24 Ivan Franko Str, UA-82100 Drogobych, Ukraine
关键词
MAGNETIC SEMICONDUCTORS; ZNO;
D O I
10.1051/epjconf/201713303004
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work we developed and tested spray pyrolysis system for layers deposition. In the system we have used ultrasonic apparatus (nebulizator) as a sprayer. A zinc nitrate aqueous solution has been used as a precursor solution. The idea of the method is the decomposition of nitrate on a hot substrate according to the reaction Zn(NO3)(2) -> ZnO +2 NO2 +1/2O(2). The layers were grown on glass, (001) Si and KCl substrates at the temperatures 300 - 500 degrees C. The thickness of the obtained layers was in the range 50 - 500 nm, depending on the growth time and rate. The influence of substrate temperature on the morphology of the layers has been studied by SEM method. The energy gap of the layers was found to be the range of 3.26-3.3 eV from their absorption spectra.
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页数:6
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