Faraday cup measurements of ion beams generated by high-temperature plasma

被引：0

作者：

Baranowski, J ^{[1
]}

Sadowski, M ^{[1
]}

Skladnik-Sadowska, E ^{[1
]}

机构：

[1] Soltan Inst Nucl Studies, IPJ, PL-05400 Otwock, Poland

来源：

HIGH TEMPERATURE MATERIAL PROCESSES | 2001年 / 5卷 / 04期

关键词：

RPI-systems; Faraday collectors (FC); plasma; ions;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The first part of the paper presents results of experimental studies of deuterium- and nitrogen-ions which are produced within the RPI (Rod Plasma Injector) devices (called also the IONOTRON-type systems) equipped with fast-acting electromagnetic gas-valves. The second part concerns results of measurements of the plasma potential, as performed by means of Faraday-type collectors (FC). The last part describes an example of the application of the FC technique to studies of nitrogen-ions energies during the implantation process performed with the use of pulsed plasma-ion streams. It is shown that the modem FC-type collectors can be useful for basic research in the field of plasma physics as well for measurements in pulsed plasma facilities used for technological applications.

引用

页码：517 / 526

页数：10

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