Recent developments in MEMS sensors: a review of applications, markets and technologies

Purpose - The purpose of this paper is to provide an introduction to micro-electromechanical systems (MEMS) sensors and their commercialisation and to consider a number of recent applications, markets and product developments. Design/methodology/approach - Following an introduction and a brief historical background to MEMS sensors and their commercialisation, the paper describes a selection of recent applications, with an emphasis on high volume uses. Various market figures are included to place these applications in a commercial context. Sensors for both physical variables and gases are considered. Findings - The paper shows that MEMS sensor applications continue to grow in the automotive, consumer electronics and other industries, which consume many millions of sensors annually. New product developments reflect the requirement for smaller and lower-cost sensors with enhanced performance and greater functionality. Markets for physical sensors dominate but MEMS technology is making progressive inroads in the gas sensing field. Originality/value - This article provides a timely review of a selection of recent MEMS sensor applications, markets and product developments.