Periodic vapor-phase fluctuation influence on growth of diamond films

被引:1
|
作者
Zhai, HZ [1 ]
Cao, CB
Zhu, HS
Li, JB
机构
[1] Beijing Inst Technol, Math Sci Res Ctr, Beijing 100081, Peoples R China
[2] Tsing Hua Univ, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
关键词
diamond films; fractal structure; methane flow; periodic fluctuation;
D O I
10.1016/S0925-9635(99)00150-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A computer control system was designed to work with diamond him deposition apparatus to control methane flow automatically. In experiments, the methane flow can fluctuate with a fixed period and fixed amplitude cosine curve. Diamond films were deposited by direct current are plasma jet acid their morphologies were examined by scanning electron microscopy. This proved that the reaction vapor-phase periodic fluctuation had an obvious influence upon the growth and nucleation of diamond. The phenomena of alternate growth and nucleation were observed; especially interesting are the two-dimensional fractal carbon clusters that have been observed for the first time. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:1891 / 1894
页数:4
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