A novel inertial switch with an adjustable acceleration threshold using an MEMS digital-to-analog converter

被引：20
|
作者：
Ma, Cheng-Wen [1 ]
Huang, Po-Cheng [1 ]
Kuo, Jui-Chang [1 ]
Kuo, Wen-Cheng [2 ,3 ]
Yang, Yao-Joe [1 ]
机构：
[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10617, Taiwan
[2] Natl Kaohsiung First Univ Sci & Technol, Dept Mech & Automat Engn, Kaohsiung, Taiwan
[3] Natl Kaohsiung First Univ Sci & Technol, Grad Inst Ind Design, Kaohsiung, Taiwan
来源：
MICROELECTRONIC ENGINEERING | 2013年 / 110卷
关键词：
Inertial switch; MEMS digital-to-analog converter; Parylene; KOH etching; SENSOR; ACCELEROMETER; SYSTEMS;
D O I：
10.1016/j.mee.2013.02.069
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study presents the development of an inertial switch that uses an MEMS digital-to-analog converter (M-DAC) to adjust acceleration thresholds. The proposed device consists of an M-DAC layer with a proof-mass, latching layer, and PDMS cap. Various PDMS' caps can be used to push the selected adjusting plates of the M-DAC layer, generating specific displacement states of the proof-mass, thereby enabling the adjustment of the acceleration thresholds. When an applied acceleration exceeds the specified acceleration threshold, the proof-mass moves up and latches onto the latching layer to record the inertia impact., In addition, the unlatching of the device can be easily achieved by rotating the proof-mass of the M-DAC layer using needles. The suspensions of the M-DAC layer are fabricated with parylene-C to achieve a low stiffness. The latching layer is fabricated using simple KOH etching with corner compensation. The PDMS cap is constructed using SU-8 molds. The acceleration thresholds can be varied from 40 to 75 g by using various PDMS caps. The measured results are in good agreement with the analytical results. (C) 2013 Elsevier B.V. All rights reserved.
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页码：374 / 380
页数：7
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