Accurate Equivalent Circuit Model of Deep Trench Capacitors by Numerical Simulation and Analytical Calculation

被引：0
|
作者：
Fathnan, Ashif Aminulloh [1 ]
Kumar, Vikash [1 ]
Yang, Shao-Ming [1 ]
Sheu, Gene [2 ]
机构：
[1] Asia Univ, Dept Comp Sci & Informat Engn, 500 Lioufeng Rd, Taichung 41354, Taiwan
[2] Asia Univ, Dept Photon & Commun Engn, 500 Lioufeng Rd, Taichung 41354, Taiwan
来源：
IEEE INTERNATIONAL SYMPOSIUM ON NEXT-GENERATION ELECTRONICS 2013 (ISNE 2013) | 2013年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents an analytical model of y-parameters for trench capacitors devices. 2-d poisson's solution is used, which gives the closed form solutions of the potential and electrical field distributions as a function of the structure parameters and top electrode bias. Dependence of substrate equivalent series resistance on current path length of top electrode to ground is also simulated. Optimum high-capacitance and low series resistance devices is proposed. Analytical results are in a good agreement with simulation results obtained by sentaurus and previous experimental data.
引用
收藏
页数：4
相关论文
共 50 条
  • [1] A Comprehensive and Accurate Analytical SPAD Model for Circuit Simulation
    Cheng, Zeng
    Zheng, Xiaoqing
    Palubiak, Darek
    Deen, M. Jamal
    Peng, Hao
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2016, 63 (05) : 1940 - 1948
  • [2] Equivalent Circuit Model for Thermal Resistance of Deep Trench Isolated Bipolar Transistors
    Rashmi
    Armstrong, G. A.
    Harrington, S. J.
    Bousquet, A.
    Nigrin, S.
    [J]. 2010 IEEE BIPOLAR/BICMOS CIRCUITS AND TECHNOLOGY MEETING (BCTM), 2010, : 261 - 264
  • [3] A Universal Equivalent Circuit Model for Ceramic Capacitors
    Yamanaga, Koh
    Amakawa, Shuhei
    Masu, Kazuya
    Sato, Takashi
    [J]. IEICE TRANSACTIONS ON ELECTRONICS, 2010, E93C (03): : 347 - 354
  • [4] EQUIVALENT-CIRCUIT MODEL OF MULTIPORT OVERLAY CAPACITORS
    BARTOLUCCI, G
    GIANNINI, F
    LIMITI, E
    MARSH, SP
    [J]. ELECTRONICS LETTERS, 1995, 31 (17) : 1402 - 1403
  • [5] An improved model of Robinson equivalent circuit analytical model
    Mao XiangYu
    Du PingAn
    [J]. SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2010, 53 (07) : 1993 - 1999
  • [6] An improved model of Robinson equivalent circuit analytical model
    MAO XiangYu & DU PingAn School of Mechatronics Engineering
    [J]. Science China Technological Sciences, 2010, (07) : 1993 - 1999
  • [7] An improved model of Robinson equivalent circuit analytical model
    MAO XiangYu DU PingAn School of Mechatronics Engineering University of Electronic Science and Technology of China Chengdu China
    [J]. Science China(Technological Sciences)., 2010, 53 (07) - 1999
  • [8] An improved model of Robinson equivalent circuit analytical model
    XiangYu Mao
    Ping An Du
    [J]. Science China Technological Sciences, 2010, 53 : 1993 - 1999
  • [9] Behavioral Average Modeling and Equivalent Circuit Simulation of Switched Capacitors Converters
    Ben-Yaakov, Shmuel
    [J]. IEEE TRANSACTIONS ON POWER ELECTRONICS, 2012, 27 (02) : 632 - 636
  • [10] A new circuit simulation model of ferroelectric capacitors
    Tamura, T
    Arimoto, Y
    Ishiwara, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (4B): : 2654 - 2657
12345