Integration of Terahertz Quantum Cascade Lasers with Lithographically Micromachined Waveguides

被引：0
|
作者：
Wanke, Michael C. [1 ]
Nordquist, Christopher [1 ]
Arrington, Christian L. [1 ]
Rowen, Adam M. [1 ]
Grine, Albert D. [1 ]
Shaner, Eric A. [1 ]
Lee, Mark [1 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源：
2008 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES, VOLS 1 AND 2 | 2008年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Gold rectangular waveguides suitable for single mode operation at frequencies near 3 THz have been micromachined using silicon microfabrication methods. The design, fabrication, and loss characteristics of these waveguides will be presented. On-chip integration of these waveguide structures with THz quantum cascade laser (QCL) sources has been achieved and the characteristics of QCL beams guided by waveguide will be discussed.
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页码：244 / 244
页数：1
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