Dual-wavelength off-axis digital holography using a single light-emitting diode

被引:21
|
作者
Cho, Janghyun [1 ]
Lim, Jinsang [1 ]
Jeon, Sungbin [2 ]
Choi, Guk-Jong [2 ]
Moon, Hyungbae [2 ]
Park, No-Cheol [2 ]
Park, Young-Pil [2 ]
机构
[1] Yonsei Univ, Ctr Informat Storage Device, Seoul 120749, South Korea
[2] Yonsei Univ, Dept Mech Engn, Seoul 120749, South Korea
来源
OPTICS EXPRESS | 2018年 / 26卷 / 02期
基金
新加坡国家研究基金会;
关键词
LED ILLUMINATION; MICROSCOPY; COMPENSATION; IMAGE;
D O I
10.1364/OE.26.002123
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We propose a new low-coherence interferometry system for dual-wavelength off-axis digital holography. By utilizing diffraction gratings, two beams with narrower bandwidths and different center wavelengths could be filtered in a single light-emitting diode. The characteristics of the system are analytically determined to extend the coherence length and field-of-view enough for off-axis configuration. The proposed system enables the fast and accurate measurement of the surface profile with more than a micrometer step height and less noise. The performance of the system is verified by the experimental results of a standard height sample. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:2123 / 2131
页数:9
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