CMOS 10-cantilever array for constant-force parallel scanning AFM

We present an array of ten force sensors for application in parallel scanning Atomic Force Microscopy (AFM) fabricated with industrial CMOS technology. The system combines, on a single chip, ten cantilever force sensors as well as driving and signal conditioning circuit. The cantilevers feature integrated thermal actuators for independent deflection of the cantilevers and a piezoresistive Wheatstone bridge to measure the cantilever deflection. The output signals from the cantilevers are amplified and multiplexed on-chip. The AFM probes were tested and parallel scanning images in constant force mode were recorded. Using the cantilever array, neighboring scanning areas of 110 mum X 110 mum were scanned consecutively, spanning an area of 1.1 mm by 110 mum in total.