Preparation and characterization of multilayer anti-reflective coatings via sol-gel process

被引：31
|
作者：
Kesmez, Omer [1 ,2 ]
Akarsu, Esin [1 ,2 ]
Camurlu, H. Erdem [3 ]
Yavuz, Emre [1 ,2 ]
Akarsu, Murat [1 ,2 ]
Arpac, Ertugrul [1 ,2 ]
机构：
[1] Akdeniz Univ, Dept Chem, Fac Sci, Dumlupinar Bulvari, TR-07058 Antalya, Turkey
[2] NANOen R&D Ltd, Akdeniz Univ Campus, TR-07058 Antalya, Turkey
[3] Akdeniz Univ, Dept Mech Engn, TR-07058 Antalya, Turkey
来源：
CERAMICS INTERNATIONAL | 2018年 / 44卷 / 03期
关键词：
Sol-gel processes; Optical properties; Functional applications; Anti-reflective coatings; Nanometric films; FILMS;
D O I：
10.1016/j.ceramint.2017.11.088
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Single layer and multilayer films consisting of SnO2, Ta2O5, SiO2, TiO2, indium tin oxide (ITO) and antimony tin oxide (ATO) have been prepared by sol-gel dip coating technique. All of the multilayer films contained a SiO2 top layer, which was composed of SiO2 nanoparticles. The other films had polymeric character. Obtained films were characterized by ellipsometry, XRD, AFM and SEM. Light transmittance values of the films were compared. Films other than SiO2 and Ta2O5 were found to have crystalline structure. Thickness values of the films were in the range of 30-115 nm and roughness values were in 1.2-23 nm range. Single layer porous silica provided 95% light transmittance, whereas ITO-TiO2-SiO2 multilayer film provided a light transmittance of 97.2%.
引用
收藏
页码：3183 / 3188
页数：6
相关论文
共 50 条
  • [1] Anti-reflective coatings for CRTs by sol-gel process
    Abe, K
    Sanada, Y
    Morimoto, T
    [J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2001, 22 (1-2) : 151 - 166
  • [2] Anti-Reflective Coatings for CRTs by Sol-Gel Process
    K. Abe
    Y. Sanada
    T. Morimoto
    [J]. Journal of Sol-Gel Science and Technology, 2001, 22 : 151 - 166
  • [3] Anti-reflective coatings for CRTs by sol-gel process
    Abe, K
    Sanada, Y
    Morimoto, T
    [J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2003, 26 (1-3) : 709 - 713
  • [4] Anti-Reflective Coatings for CRTs by Sol-Gel Process
    K. Abe
    Y. Sanada
    T. Morimoto
    [J]. Journal of Sol-Gel Science and Technology, 2003, 26 : 709 - 713
  • [5] Sol-Gel Synthesis of Anti-Reflective Mesoporous Coatings Based on Silicon Dioxide
    O. E. Gerancheva
    Yu. O. Pashkina
    T. Yu. Rusanova
    L. N. Bondareva
    [J]. Glass and Ceramics, 2018, 74 : 428 - 431
  • [6] Sol-Gel Synthesis of Anti-Reflective Mesoporous Coatings Based on Silicon Dioxide
    Gerancheva, O. E.
    Pashkina, Yu. O.
    Rusanova, T. Yu.
    Bondareva, L. N.
    [J]. GLASS AND CERAMICS, 2018, 74 (11-12) : 428 - 431
  • [7] Comparision of Silica Anti-Reflective Films Obtained via a Sol-Gel Process in the Presence of PEG or PVP
    Tian Hong
    Zhang Lei
    Xu Yao
    Wu Dong
    Wu Zhong-Hua
    Lu Hai-Bing
    Yuan Xiao-Dong
    [J]. ACTA PHYSICO-CHIMICA SINICA, 2012, 28 (05) : 1197 - 1205
  • [8] Anti-reflective coatings of flowerlike alumina on various glass substrates by the sol-gel process with the hot water treatment
    Yamaguchi, N
    Tadanaga, K
    Matsuda, A
    Minami, T
    Tatsumisago, M
    [J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2005, 33 (01) : 117 - 120
  • [9] Comparison of the properties of various sol-gel derived anti-reflective (AR) coatings on SLS glasses
    Sam, ED
    Budakoglu, R
    Gunay, V
    [J]. EURO CERAMICS VIII, PTS 1-3, 2004, 264-268 : 391 - 394
  • [10] Influence of TEOS concentration and Triton additive on the nanostructure silica sol-gel anti-reflective coatings
    Ahangarani, Shahrokh
    Lari, Najme
    Shanaghi, Ali
    [J]. INTERNATIONAL JOURNAL OF MATERIALS & PRODUCT TECHNOLOGY, 2017, 55 (04): : 319 - 330
12345