Injection MOCVD of BaTiO3/SrTiO3 artificial superlattices

被引：3
|
作者：
Lindner, J
Weiss, F
Sénateur, JP
Haessler, W
Koebernik, G
Figueras, A
Santiso, J
机构：
[1] Inst Natl Polytech Grenoble, LMGP, F-38402 St Martin Dheres, France
[2] IFW, D-01714 Dresden, Germany
[3] ICMAB, Bellaterra 08193, Spain
来源：
JOURNAL DE PHYSIQUE IV | 1999年 / 9卷 / P8期
关键词：
D O I：
10.1051/jp4:1999851
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
in this paper we report on the deposition of BST films and BaTiO3/SrTiO3 superlattices (BTOISTO) obtained by injection MOCVD. In a first time, BST films were deposited on various substrates such as LaAlO3(LAO), SrTiO3:Nb(STO:Nb) and Al2O,(0001), resulting in epitaxial films in the case of STO or LAO substrates and highly textured films in the case of Al2O3 substrates. The good crystallinity of the films obtained was evidenced using X-ray analysis. Concerning the dielectric properties of the BST films deposited on STO:Nb one can mention that the T-c values were found to be the same as those for bulk materials. Furthermore, the feasibility of BTO/STO multilayers on Al2O3 (0001) was investigated. The grown superlattices were (111) oriented, displaying good crystallinity.
引用
收藏
页码：411 / 418
页数：8
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