Commissioning of Soft and Deep X-ray Lithography Beamline on Indus-2

被引：4
|
作者：
Dhamgaye, V. P. [1 ]
Sankar, B. Gowri [1 ]
Garg, C. K. [1 ]
Lodha, G. S. [1 ]
机构：
[1] Raja Ramanna Ctr Adv Technol, Indus Synchrotrons Utilisat Div, Indore, Madhya Pradesh, India
来源：
SOLID STATE PHYSICS, PTS 1 AND 2 | 2012年 / 1447卷
关键词：
Synchrotron Radiation; X-ray Lithography; Micro Fabrication; High Aspect Ratio Micro structures;
D O I：
10.1063/1.4710111
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Soft and Deep x-ray lithography (SDXRL) beamline is commissioned on Indus-2. The beamline can be operated between 1.5 to 20 keV and in white beam mode. Beamline consists of two x-ray mirrors, slits, Be-windows, beam diagnostics and filters assemblies and radiation safety systems. A custom built X-ray scanner is used to create 3-D high aspect ratio micro structures. The paper reports the commissioning results of this beamline.
引用
收藏
页码：527 / 528
页数：2
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