Modeling and Simulation of the Ferroelectric Based Micro Gyroscope: FEM Analysis

被引：1
|
作者：
Ozer, Zafer [1 ]
Mamedov, Amirullah M. [2 ]
Ozbay, Ekmel [2 ]
机构：
[1] Mersin Univ, Mersin, Turkey
[2] Bilkent Univ, Nanotechnol Res Ctr NANOTAM, Ankara, Turkey
来源：
FERROELECTRICS | 2013年 / 446卷 / 01期
关键词：
gyroscope; ferroelectrics; FEM;
D O I：
10.1080/00150193.2013.821002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes five steps to perform the critical analysis: design a novel structure, define the failure mechanisms under the given conditions, analyze different vibrations, analyze the operation principle, and detect resonance modes. In addition, MEMS failure modes were analyzed under different scenarios and the obtained results discussed.
引用
收藏
页码：46 / 58
页数：13
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