Atmospheric Pressure Radio Frequency Dielectric Barrier Discharges in Nitrogen/Argon

被引：2
|
作者：
Liu Zhongwei [1 ]
Yang Lizhen [1 ]
Wang Zhengduo [1 ]
Sang Lijun [1 ]
Zhu Qiang [1 ]
Li Sen [1 ]
机构：
[1] Beijing Inst Graph Commun, Lab Plasma Phys & Mat, Beijing 102600, Peoples R China
来源：
PLASMA SCIENCE & TECHNOLOGY | 2013年 / 15卷 / 09期
基金：
中国国家自然科学基金;
关键词：
atmospheric pressure; dielectric barrier discharge; radio frequency discharge; GLOW-DISCHARGES; RADIOFREQUENCY; DEPOSITION; FILMS;
D O I：
10.1088/1009-0630/15/9/07
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
This work reports the experimental results on the characteristics of radio frequency dielectric barrier N-2/Ar discharges. Depending on the nitrogen content in the feed gas and the input power, the discharge can operate in two different modes: a homogeneous glow discharge and a constricted discharge. With increasing input power, the number of discharge columns increases. The discharge columns have starlike structures and exhibit symmetric self-organized arrangement. Optical emission spectroscopy was performed to estimate the plasma temperature. Spatially resolved gas temperature measurements, determined from NO emission rotational spectroscopy were taken across the 4.4 mm gap filled by the discharge. Gas temperature in the middle of the gas gap is lower than that close to the electrodes.
引用
收藏
页码：871 / 874
页数：4
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